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MEMS Reliability

Allyson L. Hartzell

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

GenresMicroelectromechanical systemsReliability

291 pages, 3 editions

English edition · First published 2011 by Springer · ISBN 9781441960177

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Editions

3 editions

English

  • MEMS Reliability · Springer · 2011 · ISBN 9781441960177 This page
  • MEMS Reliability · Springer US · 2012 · ISBN 9781461427360
  • MEMS Reliability · Springer US · 2011 · ISBN 9781441960184

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