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Piezoelectric MEMS

Ulrich Schmid and Michael Schneider

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

GenresTechnology & Engineering

176 pages, 2 editions

English edition · First published 2016 by MDPI · ISBN 9783038970057

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Editions

2 editions

English

  • Piezoelectric MEMS · MDPI · 2018 · ISBN 9783038970057 This page
  • Piezoelectric MEMS · MDPI · 2016 · ISBN 9783038970064

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